MITO DENKO水户电工MBE-260_MBE装置
MBE装置MBE-260概要：
水户电工MBE设备是超高真空装置，可以用从外部引入的激光在真空中激发，并将材料沉积在衬底上。
MBE装置MBE-260规格参数：
Configure Spec
Processing room
and vacuum exhaust system Chamber Sharpφ260mm Spherical SUS
Reaching vacuum Less than6.7×10-7Pa (5×10-9Torr)
Ceramic bearing
turbo pump 250L/s
Target revolution unit φ20mm×6 axes
Rotation / revolution motor drive (PC control)
Substrate heating unit Infrared lamp substrate heating unit (can be changed to semiconductor
laser substrate heating unit)
Size of substrate 10mm
Maximum
heating temperature Above 800℃
Common specification Power supply / control rack (JIS standard compliant) integrated chamber frame
PLD automatic control system (PC and control software)
了解更多：http://www.hapoin.com/Science_Device/
MITO DENKO水户电工MBE-260_MBE装置相关产品：
衡鹏供应
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MITO DENKO水户电工RHEED-1000 RHEED Unit
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